Finite time stable inversion in discrete frequency domain: Accuracy analysis, improvement and application to wafer stage.

Li, Li; Liu, Yang; Fu, Xuewei; Song, Fazhi; Tan, Jiubin.

Afiliação

Li L; Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China; Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China. Electronic address: h
Liu Y; Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China; Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China; State Key Lab of Digi
Fu X; State Key Laboratory of ASIC & System, School of Microelectronics, Fudan University, Shanghai 200433, China. Electronic address: xwfu17@fudan.edu.cn.
Song F; Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China; Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China; State Key Lab of Digi
Tan J; Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China; Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China. Electronic address: j

ISA Trans ; 132: 462-476, 2023 Jan.

Article em En | MEDLINE | ID: mdl-35786516