AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application.

Liu, Yichen; Wang, Lihao; Su, Yongquan; Zhang, Yuyao; Wang, Yang; Wu, Zhenyu.

Afiliação

Liu Y; State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Wang L; State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Su Y; State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Zhang Y; School of Microelectronics, Shanghai University, Shanghai 200444, China.
Wang Y; School of Microelectronics, Shanghai University, Shanghai 200444, China.
Wu Z; Shanghai Industrial Technology Research Institute, Shanghai 201800, China.

Micromachines (Basel) ; 13(9)2022 Sep 18.

Article em En | MEDLINE | ID: mdl-36144173