Polycrystalline silicon PhC cavities for CMOS on-chip integration.

Iadanza, S; Devarapu, G C R; Blake, A; Alba, P Acosta; Pedini, J-M; O'Faolain, L.

Afiliação

Iadanza S; Tyndall National Institute, Lee Maltings, Dyke Parade, Cork, Ireland. simone.iadanza@mycit.ie.
Devarapu GCR; Munster Technological University, Rossa Avenue, Bishopstown, Cork, Ireland. simone.iadanza@mycit.ie.
Blake A; Tyndall National Institute, Lee Maltings, Dyke Parade, Cork, Ireland.
Alba PA; Munster Technological University, Rossa Avenue, Bishopstown, Cork, Ireland.
Pedini JM; Tyndall National Institute, Lee Maltings, Dyke Parade, Cork, Ireland.
O'Faolain L; Université Grenoble Alpes, CEA, LETI, 38000, Grenoble, France.

Sci Rep ; 12(1): 17097, 2022 Oct 12.

Article em En | MEDLINE | ID: mdl-36224273

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article