Characterization of Ferroelectric Al0.7Sc0.3N Thin Film on Pt and Mo Electrodes.

Characterization of Ferroelectric Al_0.7Sc_0.3N Thin Film on Pt and Mo Electrodes.

Nie, Ran; Shao, Shuai; Luo, Zhifang; Kang, Xiaoxu; Wu, Tao.

Afiliação

Nie R; Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China.
Shao S; Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China.
Luo Z; Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Kang X; University of Chinese Academy of Sciences, Beijing 100049, China.
Wu T; Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China.

Micromachines (Basel) ; 13(10)2022 Sep 28.

Article em En | MEDLINE | ID: mdl-36295981