Wide-field tomography imaging of a double circuit using NV center ensembles in a diamond.

ABSTRACT

The wide-field (2.42 mm × 1.36 mm, resolution 5.04 µm) tomography imaging of double circuits is performed using nitrogen-vacancy (NV) center ensembles in a diamond. The magnetic-field distribution on the surface of the circuit produced by the lower layer is obtained. Vector magnetic superposition is used to separate the magnetic-field distribution produced by the lower layer from the magnetic-field distribution produced by two layers. An inversion model is used to perform the tomography imaging of the magnetic-field distribution on the lower layer surface. Compared with the measurements of the upper layer, the difference in the maximum magnetic-field intensity of inversion is approximately 0.4%, and the difference in the magnetic-field distribution of inversion is approximately 8%, where the depth of the lower layer is 0.32 mm. Simulations are conducted to prove the reliability of the imaging. These results provide a simple and highly accurate reference for the detection and fault diagnosis of multilayer and integrated circuits.