A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle.

Zhu, Junhui; Meng, Siyuan; Wang, Yong; Pang, Ming; Hu, Zhiping; Ru, Changhai.

Afiliação

Zhu J; School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China.
Meng S; State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150000, China.
Wang Y; School of Electronic and Information Engineering, Suzhou University of Science and Technology, Suzhou 215000, China.
Pang M; College of Intelligent Systems Science and Engineering, Harbin Engineering University, Harbin 150001, China.
Hu Z; Micro-Nano Automation Institute, JITRI, Suzhou 215100, China.
Ru C; School of Electronic and Information Engineering, Suzhou University of Science and Technology, Suzhou 215000, China.

Micromachines (Basel) ; 13(11)2022 Nov 18.

Article em En | MEDLINE | ID: mdl-36422437