Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures.

Pham, Hoang-Lam; Alcaire, Thomas; Soulan, Sebastien; Le Cunff, Delphine; Tortai, Jean-Hervé.

Afiliação

Pham HL; LTM, CNRS, CEA/LETI-Minatec, Grenoble INP, Institute of Engineering and Management, Université Grenoble Alpes, 38054 Grenoble, France.
Alcaire T; STMicroelectronics, 38920 Crolles, France.
Soulan S; LTM, CNRS, CEA/LETI-Minatec, Grenoble INP, Institute of Engineering and Management, Université Grenoble Alpes, 38054 Grenoble, France.
Le Cunff D; STMicroelectronics, 38920 Crolles, France.
Tortai JH; LTM, CNRS, CEA/LETI-Minatec, Grenoble INP, Institute of Engineering and Management, Université Grenoble Alpes, 38054 Grenoble, France.

Nanomaterials (Basel) ; 12(22)2022 Nov 09.

Article em En | MEDLINE | ID: mdl-36432236