Multi-Grid Capacitive Transducers for Measuring the Surface Profile of Silicon Wafers.

Zheng, Panpan; Cai, Bingyang; Zhu, Tao; Yu, Li; Wu, Wenjie; Tu, Liangcheng.

Afiliação

Zheng P; WuHan National Laboratory for Optoelectronics, Wuhan 430074, China.
Cai B; The MOE Key Laboratory of Fundamental, Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China.
Zhu T; Beijing Institute of Smart Energy (BISE), Beijing 100085, China.
Yu L; The MOE Key Laboratory of Fundamental, Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China.
Wu W; The MOE Key Laboratory of Fundamental, Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China.
Tu L; TianQin Research Center for Gravitational Physics, School of Physics and Astronomy, Sun Yat-sen University, Zhuhai 519000, China.

Micromachines (Basel) ; 14(1)2022 Dec 31.

Article em En | MEDLINE | ID: mdl-36677183