Isotopically Enriched Layers for Quantum Computers Formed by <sup>28</sup>Si Implantation and Layer Exchange.

Isotopically Enriched Layers for Quantum Computers Formed by ²⁸Si Implantation and Layer Exchange.

Schneider, Ella; England, Jonathan.

Afiliação

Schneider E; Surrey Ion Beam Centre, Advanced Technology Institute, University of Surrey, Guildford GU2 7XH, United Kingdom.
England J; Surrey Ion Beam Centre, Advanced Technology Institute, University of Surrey, Guildford GU2 7XH, United Kingdom.

ACS Appl Mater Interfaces ; 15(17): 21609-21617, 2023 May 03.

Article em En | MEDLINE | ID: mdl-37075328

Palavras-chave

ion implantation; isotopically pure layers; metal-induced layer exchange; quantum computing; semiconductor

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article