UV Sensor Based on Surface Acoustic Waves in ZnO/Fused Silica.

Caliendo, Cinzia; Benetti, Massimiliano; Cannatà, Domenico; Buzzin, Alessio; Grossi, Francesca; Verona, Enrico; de Cesare, Giampiero.

Afiliação

Caliendo C; Institute for Photonics and Nanotechnology (IFN), Unit of Rome, National Research Council (CNR), Via del Fosso del Cavaliere 100, 00133 Rome, Italy.
Benetti M; Institute for Microelectronics and Microsystems (IMM), Unit of Rome, National Research Council (CNR), Via del Fosso del Cavaliere 100, 00133 Rome, Italy.
Cannatà D; Institute for Microelectronics and Microsystems (IMM), Unit of Rome, National Research Council (CNR), Via del Fosso del Cavaliere 100, 00133 Rome, Italy.
Buzzin A; Department of Information Engineering, Electronics and Telecommunications, Sapienza University of Rome, Via Eudossiana 18, 00184 Rome, Italy.
Grossi F; Department of Information Engineering, Electronics and Telecommunications, Sapienza University of Rome, Via Eudossiana 18, 00184 Rome, Italy.
Verona E; Institute for Photonics and Nanotechnology (IFN), Unit of Rome, National Research Council (CNR), Via del Fosso del Cavaliere 100, 00133 Rome, Italy.
de Cesare G; Department of Information Engineering, Electronics and Telecommunications, Sapienza University of Rome, Via Eudossiana 18, 00184 Rome, Italy.

Sensors (Basel) ; 23(9)2023 Apr 22.

Article em En | MEDLINE | ID: mdl-37177399