An analysis of nonlinear thickness vibration frequencies of multi-layered film bulk acoustic resonators.

The fast reduction of the physical size of film bulk acoustic wave resonators as a layered structure implies the intensification of the electric field which can induce large deformation in the functioning state of devices as a circuit element. Consequently, the nonlinear behavior of the resonator and accompanying properties are to be included and evaluated in the development and optimization for performance improvement. With this objective, the nonlinear formulation of a multilayered film bulk acoustic resonator is presented for the analysis of vibration frequencies and mode shapes with the consideration of larger mechanical deformation. The dominantly linear relationship between the voltage or deformation and frequency is obtained to understand the nonlinear behavior and properties which have been subjected to extensive research analytically and experimentally to satisfy the application needs in all modes of communications and network technology.