A Low-Noise Interface ASIC for MEMS Disk Resonator Gyroscope.

Zhang, Wenbo; Yin, Liang; Wang, Yihang; Lv, Risheng; Zhang, Haifeng; Chen, Weiping; Liu, Xiaowei; Fu, Qiang.

Afiliação

Zhang W; MEMS Center, Harbin Institute of Technology, Harbin 150001, China.
Yin L; Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Harbin Institute of Technology, Ministry of Education, Harbin 150001, China.
Wang Y; MEMS Center, Harbin Institute of Technology, Harbin 150001, China.
Lv R; Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Harbin Institute of Technology, Ministry of Education, Harbin 150001, China.
Zhang H; MEMS Center, Harbin Institute of Technology, Harbin 150001, China.
Chen W; Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Harbin Institute of Technology, Ministry of Education, Harbin 150001, China.
Liu X; China Academy of Information and Communications Technology, Beijing 100191, China.
Fu Q; MEMS Center, Harbin Institute of Technology, Harbin 150001, China.

Micromachines (Basel) ; 14(6)2023 Jun 15.

Article em En | MEDLINE | ID: mdl-37374841