Fabrication of Specimens for Atom Probe Tomography Using a Combined Gallium and Neon Focused Ion Beam Milling Approach.

Allen, Frances I; Blanchard, Paul T; Lake, Russell; Pappas, David; Xia, Deying; Notte, John A; Zhang, Ruopeng; Minor, Andrew M; Sanford, Norman A.

Afiliação

Allen FI; Department of Materials Science and Engineering, UC Berkeley, Berkeley, CA 94720, USA.
Blanchard PT; National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA.
Lake R; Physical Measurement Laboratory, National Institute of Standards and Technology, Boulder, CO 80305, USA.
Pappas D; Physical Measurement Laboratory, National Institute of Standards and Technology, Boulder, CO 80305, USA.
Xia D; Physical Measurement Laboratory, National Institute of Standards and Technology, Boulder, CO 80305, USA.
Notte JA; Carl Zeiss SMT Inc., Danvers, MA 01923, USA.
Zhang R; Carl Zeiss SMT Inc., Danvers, MA 01923, USA.
Minor AM; Department of Materials Science and Engineering, UC Berkeley, Berkeley, CA 94720, USA.
Sanford NA; National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA.