Low-loss and power-efficient phase shifter based on an optimized multimode spiral silicon waveguide.

Low-loss and energy-efficient phase shifters are an effective tool to reduce the power consumption of large-scale photonic integrated circuits. In this work, a low-loss and power-efficient thermo-optic phase shifter has been demonstrated on the silicon-on-insulator platform. The multimode spiral waveguide is optimized to obtain lower power consumption and low cross talk. The waveguide width is beyond the single-mode region in consideration of low propagation loss. The optimized ultra-low loss 180° Bezier bends are used to further reduce the bending loss. The experimental results show that the excess loss of the phase shifter is only 0.36 dB at 1550-nm wavelength and the power consumption is 4.87 mW/π.