Direct etching of nano/microscale patterns with both few-layer graphene and high-depth graphite structures by the raster STM electric lithography in the ambient conditions. | J Microsc;292(1): 37-46, 2023 Oct. | MEDLINE

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Direct etching of nano/microscale patterns with both few-layer graphene and high-depth graphite structures by the raster STM electric lithography in the ambient conditions.

Yang, Ye; Xu, Yang.

Afiliação

Yang Y; College of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai, China.
Xu Y; Department of Materials Science and Engineering, UC Berkeley, Berkeley, California.

J Microsc ; 292(1): 37-46, 2023 Oct.

Article em En | MEDLINE | ID: mdl-37681465

Palavras-chave

STM electric lithography; few-layer graphene; local anodic oxidation; nano/microscale fabrication; nanoscale electric discharge

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Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article

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Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article