Correction: Integrated silicon photonic MEMS.

Quack, Niels; Takabayashi, Alain Yuji; Sattari, Hamed; Edinger, Pierre; Jo, Gaehun; Bleiker, Simon J; Errando-Herranz, Carlos; Gylfason, Kristinn B; Niklaus, Frank; Khan, Umar; Verheyen, Peter; Mallik, Arun Kumar; Lee, Jun Su; Jezzini, Moises; Zand, Iman; Morrissey, Padraic; Antony, Cleitus; O'Brien, Peter; Bogaerts, Wim

Quack, Niels; Takabayashi, Alain Yuji; Sattari, Hamed; Edinger, Pierre; Jo, Gaehun; Bleiker, Simon J; Errando-Herranz, Carlos; Gylfason, Kristinn B; Niklaus, Frank; Khan, Umar; Verheyen, Peter; Mallik, Arun Kumar; Lee, Jun Su; Jezzini, Moises; Zand, Iman; Morrissey, Padraic; Antony, Cleitus; O'Brien, Peter; Bogaerts, Wim.

Afiliação

Quack N; École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.
Takabayashi AY; School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Camperdown, NSW 2006 Australia.
Sattari H; École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.
Edinger P; École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.
Jo G; Swiss Center for Electronics and Microtechnology (CSEM), 2002 Neuchâtel, Switzerland.
Bleiker SJ; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden.
Errando-Herranz C; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden.
Gylfason KB; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden.
Niklaus F; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden.
Khan U; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden.
Verheyen P; Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden.
Mallik AK; Department of Information Technology, Photonics Research Group, Ghent University - IMEC, Technologiepark-Zwijnaarde 126, 9052 Gent, Belgium.
Lee JS; imec vzw. 3DSIP Department, Si Photonics Group, Kapeldreef 75, 3001 Leuven, Belgium.
Jezzini M; Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland.
Zand I; Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland.
Morrissey P; Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland.
Antony C; Department of Information Technology, Photonics Research Group, Ghent University - IMEC, Technologiepark-Zwijnaarde 126, 9052 Gent, Belgium.
O'Brien P; Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland.
Bogaerts W; Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland.