High-Q Trampoline Resonators from Strained Crystalline InGaP for Integrated Free-Space Optomechanics.

Nanomechanical resonators realized from tensile-strained materials reach ultralow mechanical dissipation in the kHz to MHz frequency range. Tensile-strained crystalline materials that are compatible with epitaxial growth of heterostructures would thereby at the same time allow realizing monolithic free-space optomechanical devices, which benefit from stability, ultrasmall mode volumes, and scalability. In our work, we demonstrate nanomechanical string and trampoline resonators made from tensile-strained InGaP, which is a crystalline material that is epitaxially grown on an AlGaAs heterostructure. We characterize the mechanical properties of suspended InGaP nanostrings, such as anisotropic stress, yield strength, and intrinsic quality factor. We find that the latter degrades over time. We reach mechanical quality factors surpassing 107 at room temperature with a Q·f product as high as 7 × 1011Hz with trampoline-shaped resonators. The trampoline is patterned with a photonic crystal to engineer its out-of-plane reflectivity, desired for efficient signal transduction of mechanical motion to light.

Integrated microcavity optomechanics with a suspended photonic crystal mirror above a distributed Bragg reflector.

Increasing the interaction between light and mechanical resonators is an ongoing endeavor in the field of cavity optomechanics. Optical microcavities allow for boosting the interaction strength through their strong spatial confinement of the optical field. In this work, we follow this approach by realizing a sub-wavelength-long, free-space optomechanical microcavity on-chip fabricated from an (Al,Ga)As heterostructure. A suspended GaAs photonic crystal mirror is acting as a highly reflective mechanical resonator, which together with a distributed Bragg (DBR) reflector forms an optomechanical microcavity. We demonstrate precise control over the microcavity resonance by change of the photonic crystal parameters. We find that the microcavity mode can strongly couple to the transmissive modes of the DBR. The interplay between the microcavity mode and a guided resonance of the photonic crystal modifies the cavity response and results in a stronger dynamical backaction on the mechanical resonator compared to conventional optomechanical dynamics.

Nanomechanical Crystalline AlN Resonators with High Quality Factors for Quantum Optoelectromechanics.

High-quality factor (Qm) mechanical resonators are crucial for applications where low noise and long coherence time are required, as mirror suspensions, quantum cavity optomechanical devices, or nanomechanical sensors. Tensile strain in the material enables the use of dissipation dilution and strain engineering techniques, which increase the mechanical quality factor. These techniques have been employed for high-Qm mechanical resonators made from amorphous materials and, recently, from crystalline materials such as InGaP, SiC, and Si. A strained crystalline film exhibiting substantial piezoelectricity expands the capability of high-Qm nanomechanical resonators to directly utilize electronic degrees of freedom. In this work, nanomechanical resonators with Qm up to 2.9 × 107 made from tensile-strained 290 nm-thick AlN are realized. AlN is an epitaxially-grown crystalline material offering strong piezoelectricity. Nanomechanical resonators that exploit dissipation dilution and strain engineering to reach a Qm × fm-product approaching 1013 Hz at room temperature are demonstrated. A novel resonator geometry is realized, triangline, whose shape follows the Al-N bonds and offers a central pad patterned with a photonic crystal. This allows to reach an optical reflectivity above 80% for efficient coupling to out-of-plane light. The presented results pave the way for quantum optoelectromechanical devices at room temperature based on tensile-strained AlN.