Growth-rate model of epitaxial layer-by-layer growth by pulsed-laser deposition.

We present a numerical model of epitaxial thin-film growth applicable for pulsed-laser deposition on a single crystalline substrate. The model is based on rate equations describing the time development of monolayer coverages and of densities of movable particles on atomically flat terraces. Numerical solution of the equations showed that the time dependence of surface roughness obeys a scaling law, the exponent of which depends on probabilities of various atomistic processes included in the simulation model. From the time dependence of monolayer coverages we calculated x-ray diffracted intensity in a quasiforbidden anti-Bragg reflection and showed that its oscillatory behavior is affected by these probabilities as well. The results show the possibility to study atomistic processes during the deposition from the time dependence of the anti-Bragg intensity measured during deposition.

Effect of pulse laser frequency on PLD growth of LuFeO3 explained by kinetic simulations of in-situ diffracted intensities.

Atomistic processes during pulsed-laser deposition (PLD) growth influence the physical properties of the resulting films. We investigated the PLD of epitaxial layers of hexagonal LuFeO[Formula: see text] by measuring the X-ray diffraction intensity in the quasiforbidden reflection 0003 in situ during deposition. From measured X-ray diffraction intensities we determined coverages of each layer and studied their time evolution which is described by scaling exponent [Formula: see text] directly connected to the surface roughness. Subsequently we modelled the growth using kinetic Monte Carlo simulations. While the experimentally obtained scaling exponent [Formula: see text] decreases with the laser frequency, the simulations provided the opposite behaviour. We demonstrate that the increase of the surface temperature caused by impinging ablated particles satisfactorily explains the recorded decrease in the scaling exponent with the laser frequency. This phenomena is often overlooked during the PLD growth.

Effective algorithm for simulations of layer-by-layer growth during pulsed-laser deposition.

The atomistic simulation of materials growing in the layer-by-layer mode by the pulsed-laser deposition is a significant challenge mainly due to the short timescales in which the fastest processes on the surface occur together with long periods between pulses. We present a kinetic Monte Carlo algorithm which overcomes the scaling problem by approximation of fast diffusion and by neglecting complex chemical processes. The atomic diffusion is modeled as a two-dimensional gas of material units on each layer. The model is based on a few elementary processes-the condensation of units on the surface, their dissolution back to the gas, and interlayer transport, which can be influenced by the Ehrlich-Schwoebel barrier. With these simplifications, the computational time of the algorithm scales only linearly with the size of the substrate while describing physically relevant growth kinetics. We demonstrate that the simplified model is suitable for simulations of layered growth of thin films in the range from quasicontinuous deposition to low-frequency cases. The model is successfully implemented to provide an alternative explanation of the time evolution of layer coverages by interlayer transport after pulses of deposition experimentally observed during perovskite growth [G. Eres et al., Phys. Rev. B 84, 195467 (2011)PRBMDO1098-012110.1103/PhysRevB.84.195467].