RESUMO
Microchannels fabricated by femtosecond laser-assisted chemical etching are of great use in biochemical analysis. In this paper, we study the morphology change of etched microchannels in fused silica by controlling the laser scan speed, and we find a significant difference between the chemical etched length and volume. The fabricated microchannels would gradually become tapered along the scan direction, which influences the flow of the hydrofluoric (HF) reagent and the etching rate. As a result, the difference ratios of the etched length and volume, respectively, reach -5.56% and -41.83% followed by the scan speed increasing from 5 to 200 µm/s. Microchannels with polarization independence and better aspect ratio could be obtained in a high-speed-scan mode. We suggest that laser-induced structural transformation from interconnected microcracks to nanogratings could be responsible for this change. Aforementioned results offer a feasible approach to achieve polarization-independent microchannels, which is in favor of accelerating the fabrication of three-dimensional microfluidic devices.
RESUMO
The temporal chirp of single femtosecond (fs) pulses will affect the laser-induced ionization process. By comparing the ripples induced by negatively and positively chirped pulses (NCPs and PCPs), the growth rate showed a significant difference, resulting in a depth inhomogeneity of up to 144%. A carrier density model tailored with temporal characteristics showed that NCPs could excite a higher peak carrier density, contributing to a highly efficient generation of surface plasmon polaritons (SPPs) and overall advancement of the ionization rate. Such distinction originates from their contrary incident spectrum sequences. Current work reveals that temporal chirp modulation can control the carrier density in ultrafast laser-matter interaction, which possibly brings an unusual acceleration for surface structure processing.