Backscattering of metallic microstructures with small defects located on flat substrates.

ABSTRACT

Micron-sized structures on flat substrates supporting submicron defects are analyzed by means of a parameter based on integrated backscattering calculations. This analysis is performed for different particle and defect sizes, optical properties and for two different configurations (defect on the microstructure or on the substrate). Calculations in the far field are complemented by some near field results. It is shown that information about the defect presence, size and optical properties) can be obtained from the proposed backscattering parameter.