Effects of the microstructuring process on diffraction properties of bragg-fresnel lenses.
J Xray Sci Technol
; 6(3): 249-60, 1996 Jan 01.
Article
em En
| MEDLINE
| ID: mdl-21307526
ABSTRACT
The effects appearing in a crystal microstructuring by reactive ion etching on diffraction properties of Bragg-Fresnel lenses were studied. Possible deviations of the real zone structures from ideal ones were considered. The influence of the Fresnel zone displacements due to sidewall undercutting effects and due to a mask erosion was analyzed. Technological tolerances for a different zone profile shape were defined.
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Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Ano de publicação:
1996
Tipo de documento:
Article