Effects of the microstructuring process on diffraction properties of bragg-fresnel lenses.

ABSTRACT

The effects appearing in a crystal microstructuring by reactive ion etching on diffraction properties of Bragg-Fresnel lenses were studied. Possible deviations of the real zone structures from ideal ones were considered. The influence of the Fresnel zone displacements due to sidewall undercutting effects and due to a mask erosion was analyzed. Technological tolerances for a different zone profile shape were defined.