Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution.
Lab Chip
; 11(16): 2670-2, 2011 Aug 21.
Article
em En
| MEDLINE
| ID: mdl-21748145
ABSTRACT
Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 µm CMOS technology is reported. The resonator frequency is â¼13.2 MHz and exhibits a sensitivity magnitude of â¼3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH.
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1
Coleções:
01-internacional
Base de dados:
MEDLINE
Assunto principal:
Água
/
Nanotecnologia
/
Sistemas Microeletromecânicos
/
Metais
Idioma:
En
Ano de publicação:
2011
Tipo de documento:
Article