The prospects of a subnanometer focused neon ion beam.
Scanning
; 34(2): 129-34, 2012.
Article
em En
| MEDLINE
| ID: mdl-21796647
ABSTRACT
The success of the helium ion microscope has encouraged extensions of this technology to produce beams of other ion species. A review of the various candidate ion beams and their technical prospects suggest that a neon beam might be the most readily achieved. Such a neon beam would provide a sputtering yield that exceeds helium by an order of magnitude while still offering a theoretical probe size less than 1-nm. This article outlines the motivation for a neon gas field ion source, the expected performance through simulations, and provides an update of our experimental progress.
Texto completo:
1
Coleções:
01-internacional
Base de dados:
MEDLINE
Assunto principal:
Íons
/
Microscopia
/
Neônio
Idioma:
En
Ano de publicação:
2012
Tipo de documento:
Article