Reduction of scattering loss of silicon slot waveguides by RCA smoothing.
Opt Lett
; 37(1): 13-5, 2012 Jan 01.
Article
em En
| MEDLINE
| ID: mdl-22212775
ABSTRACT
Because of stronger optical confinement density, silicon slot waveguides tend to have higher scattering loss than normal ridge waveguides with same sidewall roughness. A wet chemical process is found to be highly effective in reducing the surface roughness and scattering loss. A reduction in scattering loss by 10.2 dB/cm for TE and 8.5 dB/cm for TM polarizations has been achieved.
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MEDLINE
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En
Ano de publicação:
2012
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Article