High-resolution electronic interferometry for the measurement of in-plane vibration.

ABSTRACT

This study proposes an algorithm based on the standard deviation in the temporal domain to remove influences from background noise and ambient disturbance and enhance the quality of images obtained using interferometric technology. From measurements of the first ten in-plane resonant frequencies and mode shapes of vibrating zirconate titanate (PZT) laminates, we investigated the resonant characteristics in both the U and V directions. The resulting interference fringes were used to quantify the vibration amplitude of PZT plates on a submicron scale. The resonant frequencies obtained using the proposed method are in excellent agreement with those obtained using the finite element method and an impedance analyzer.