Full-field X-ray microscopy with crossed partial multilayer Laue lenses.
Opt Express
; 22(17): 20008-13, 2014 Aug 25.
Article
em En
| MEDLINE
| ID: mdl-25321210
ABSTRACT
We demonstrate full-field X-ray microscopy using crossed multilayer Laue lenses (MLL). Two partial MLLs are prepared out of a 48 µm high multilayer stack consisting of 2451 alternating zones of WSi2 and Si. They are assembled perpendicularly in series to obtain two-dimensional imaging. Experiments are done in a laboratory X-ray microscope using Cu-Kα radiation (E = 8.05 keV, focal length f = 8.0 mm). Sub-100 nm resolution is demonstrated without mixed-order imaging at an appropriate position of the image plane. Although existing deviations from design parameters still cause aberrations, MLLs are a promising approach to realize hard X-ray microscopy at high efficiencies with resolutions down to the sub-10 nm range in future.
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01-internacional
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MEDLINE
Idioma:
En
Ano de publicação:
2014
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Article