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Electrothermally-Actuated Micromirrors with Bimorph Actuators--Bending-Type and Torsion-Type.
Tsai, Cheng-Hua; Tsai, Chun-Wei; Chang, Hsu-Tang; Liu, Shih-Hsiang; Tsai, Jui-Che.
Afiliação
  • Tsai CH; Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. d98941019@ntu.edu.tw.
  • Tsai CW; Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. d98941019@ntu.edu.tw.
  • Chang HT; Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. ckjamesbond@gmail.com.
  • Liu SH; Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. r01941068@ntu.edu.tw.
  • Tsai JC; Graduate Institute of Photonics and Optoelectronics and the Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan. juichetsai@ntu.edu.tw.
Sensors (Basel) ; 15(6): 14745-56, 2015 Jun 22.
Article em En | MEDLINE | ID: mdl-26110409
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Sistemas Microeletromecânicos Idioma: En Ano de publicação: 2015 Tipo de documento: Article
Texto completo
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XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Sistemas Microeletromecânicos Idioma: En Ano de publicação: 2015 Tipo de documento: Article