Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges.

Shan, Guanqiao; Li, Yingzi; Zhang, Liwen; Wang, Zhenyu; Zhang, Yingxu; Qian, Jianqiang

Shan, Guanqiao; Li, Yingzi; Zhang, Liwen; Wang, Zhenyu; Zhang, Yingxu; Qian, Jianqiang.

Afiliação

Shan G; Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
Li Y; Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
Zhang L; Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
Wang Z; Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
Zhang Y; Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
Qian J; Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.

Rev Sci Instrum ; 86(10): 101501, 2015 Oct.

Article em En | MEDLINE | ID: mdl-26520932

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2015 Tipo de documento: Article

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2015 Tipo de documento: Article