Single-photon-multi-layer-interference lithography for high-aspect-ratio and three-dimensional SU-8 micro-/nanostructures.

Ghosh, Siddharth; Ananthasuresh, G K

Ghosh, Siddharth; Ananthasuresh, G K.

Afiliação

Ghosh S; Department of Mechanical Engineering, Indian Institute of Science, Bangalore, 560012, Karnataka, India.
Ananthasuresh GK; Third Institute of Physics, Georg-August-Universität-Göttingen, Friedrich-Hund-Platz-1, Göttingen 37077, Germany.

Sci Rep ; 6: 18428, 2016 Jan 04.

Article em En | MEDLINE | ID: mdl-26725843

Texto completo

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4698723
https://dx.doi.org/10.1038/srep18428

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2016 Tipo de documento: Article

Texto completo

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4698723
https://dx.doi.org/10.1038/srep18428

Imprimir

XML

PubMed Links

Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2016 Tipo de documento: Article