Embedded MicroHeating Elements in Polymeric MicroChannels for Temperature Control and Fluid Flow Sensing.

ABSTRACT

This paper describes the first demonstration of temperature control and flow sensing of fluids using integrated circuit (IC)-based microheating elements embedded in microchannels molded in polydimethylsiloxane (PDMS). Fluid channels and connections to capillary tubing are molded in PDMS using a silicon wafer template. The PDMS film is then bonded to an IC that contains the micromachined microheating elements. Capillary tubes are inserted and fluids are externally pumped through the channels. Heating of the fluid is observed by the formation of bubbles on the microheating element. Sensing of fluid flow is demonstrated by measuring a change in the large signal resistance of the microheater analogous to a hot wire anemometer with a detection limit of ± 320 pL/s.