A fast and low-cost microfabrication approach for six types of thermoplastic substrates with reduced feature size and minimized bulges using sacrificial layer assisted laser engraving.

Gu, Longjun; Yu, Guodong; Li, Cheuk-Wing

Gu, Longjun; Yu, Guodong; Li, Cheuk-Wing.

Afiliação

Gu L; Institute of Chinese Medical Sciences, University of Macau, Macau SAR, China.
Yu G; Institute of Chinese Medical Sciences, University of Macau, Macau SAR, China.
Li CW; Institute of Chinese Medical Sciences, University of Macau, Macau SAR, China. Electronic address: cheukwli@umac.mo.

Anal Chim Acta ; 997: 24-34, 2018 Jan 02.

Article em En | MEDLINE | ID: mdl-29149991

Palavras-chave

CO(2) laser; High aspect ratio; Minimized bulge height; Reduced feature size; Sacrificial layer; Thermoplastics

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Health_economic_evaluation Idioma: En Ano de publicação: 2018 Tipo de documento: Article

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