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Ion implantation for deterministic single atom devices.
Pacheco, J L; Singh, M; Perry, D L; Wendt, J R; Ten Eyck, G; Manginell, R P; Pluym, T; Luhman, D R; Lilly, M P; Carroll, M S; Bielejec, E.
Afiliação
  • Pacheco JL; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
  • Singh M; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
  • Perry DL; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
  • Wendt JR; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
  • Ten Eyck G; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
  • Manginell RP; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
  • Pluym T; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
  • Luhman DR; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
  • Lilly MP; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
  • Carroll MS; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
  • Bielejec E; Sandia National Laboratories, Albuquerque, New Mexico 87185, USA.
Rev Sci Instrum ; 88(12): 123301, 2017 Dec.
Article em En | MEDLINE | ID: mdl-29289172
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2017 Tipo de documento: Article
Texto completo
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XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2017 Tipo de documento: Article