EUV polarimetry for thin film and surface characterization and EUV phase retarder reflector development.

Gaballah, A E H; Nicolosi, P; Ahmed, Nadeem; Jimenez, K; Pettinari, G; Gerardino, A; Zuppella, P

Gaballah, A E H; Nicolosi, P; Ahmed, Nadeem; Jimenez, K; Pettinari, G; Gerardino, A; Zuppella, P.

Afiliação

Gaballah AEH; University of Padova, Department of Information Engineering, Via Gradenigo 6B, 35131 Padova, Italy.
Nicolosi P; University of Padova, Department of Information Engineering, Via Gradenigo 6B, 35131 Padova, Italy.
Ahmed N; University of Padova, Department of Information Engineering, Via Gradenigo 6B, 35131 Padova, Italy.
Jimenez K; University of Padova, Department of Information Engineering, Via Gradenigo 6B, 35131 Padova, Italy.
Pettinari G; Italian National Research Council-Institute for Photonics and Nanotechnologies (CNR-IFN), Via Cineto Romano 42, Rome 00156, Italy.
Gerardino A; Italian National Research Council-Institute for Photonics and Nanotechnologies (CNR-IFN), Via Cineto Romano 42, Rome 00156, Italy.
Zuppella P; CNR-IFN UOS Padova, Via Trasea 7, 35131 Padova, Italy.

Rev Sci Instrum ; 89(1): 015108, 2018 Jan.

Article em En | MEDLINE | ID: mdl-29390727

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2018 Tipo de documento: Article

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2018 Tipo de documento: Article