CalAtom: A software for quantitatively analysing atomic columns in a transmission electron microscope image.

ABSTRACT

We developed a software tool named CalAtom in MATLAB™ for quantitative analyses of atomic columns in (scanning) transmission electron microscopy, (S)TEM, images. This software provides three algorithms to determine the position of an atomic column with high precision the moment method, the model-based method and the multiple-ellipse fitting method. Based on the measured positions, the software offers several options for further analyses, such as in-plane scale local environments of the atomic columns, local elementary composition and real-space averaging of image motifs. As an example, we use the CalAtom software to determine atomic positions and local elemental composition of the MoS2(1-x)Se2x alloy monolayers.