Your browser doesn't support javascript.
loading
Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition.
Tong, Liuchuan; Davis, Luke M; Gong, Xian; Feng, Jun; Beh, Eugene S; Gordon, Roy G.
Afiliação
  • Tong L; Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138, USA. gordon@chemistry.harvard.edu.
  • Davis LM; Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138, USA. gordon@chemistry.harvard.edu.
  • Gong X; Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA.
  • Feng J; Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138, USA. gordon@chemistry.harvard.edu.
  • Beh ES; Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138, USA. gordon@chemistry.harvard.edu.
  • Gordon RG; Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138, USA. gordon@chemistry.harvard.edu and Harvard John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA.
Dalton Trans ; 48(20): 6709-6713, 2019 May 28.
Article em En | MEDLINE | ID: mdl-31062813
ABSTRACT
Many microelectronic devices require thin films of silver or gold as wiring layers. We report silver(i) and gold(i) bicyclic amidinate complexes, wherein the constrained ligand geometry lessens the propensity for thermal decomposition. These new volatile compounds provide metallic films of silver and gold during CVD with hydrogen below 230 °C.
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2019 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2019 Tipo de documento: Article