Crafting a 1.5 µm pixel pitch spatial light modulator using Ge2Sb2Te5 phase change material [Invited].
J Opt Soc Am A Opt Image Sci Vis
; 36(12): D23-D30, 2019 Dec 01.
Article
em En
| MEDLINE
| ID: mdl-31873363
ABSTRACT
For this research, we have developed key technologies for a 1.5 µm pixel pitch spatial light modulator (SLM) using Ge2Sb2Te5 (GST) phase change material. To uniformly modulate each pixel, we designed a lateral pixel structure in which a heating current flows through a bottom indium tin oxide layer. To check hologram reconstruction both after multilevel fabrication processes and before implementing full source and driver circuits, we fabricated an 8K×2K hologram on the topology by changing the GST film's phase using laser irradiation. To overcome the limitation of SLM size, we tested a physical tiling structure and found that flatness of tiled SLMs was the most important factor in the realization of holographic displays.
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01-internacional
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MEDLINE
Idioma:
En
Ano de publicação:
2019
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Article