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Effect of the Lapping Platen Groove Density on the Characteristics of Microabrasive-Based Lapping.
Lee, Taekyung; Jeong, Haedo; Lee, Sangjik; Kim, Doyeon; Kim, Hyoungjae.
Afiliação
  • Lee T; Dongnam Regional Division, Korea Institute of Industrial Technology, Busan 46938, Korea.
  • Jeong H; School of Mechanical Engineering, Pusan National University, Busan 46241, Korea.
  • Lee S; Dongnam Regional Division, Korea Institute of Industrial Technology, Busan 46938, Korea.
  • Kim D; Dongnam Regional Division, Korea Institute of Industrial Technology, Busan 46938, Korea.
  • Kim H; Dongnam Regional Division, Korea Institute of Industrial Technology, Busan 46938, Korea.
Micromachines (Basel) ; 11(8)2020 Aug 14.
Article em En | MEDLINE | ID: mdl-32823978
Microabrasive-based lapping is widely used in the manufacturing of single-crystal substrates such as sapphire, SiC, and GaN. Although many studies have been conducted to improve the lapping process characteristics, most of them focused on process conditions or consumables. In this study, the effect of the lapping platen groove density on the lapping characteristics was studied using a sapphire substrate. Groove density was defined as the ratio of groove width to groove pitch, and the displacement of the lapping head was measured to calculate the oil film thickness. It was confirmed that, for groove densities below 0.30, hydroplaning occurs when the oil film thickness increases. When the oil film thickness is larger than the abrasive particle size, the material removal rate is low because the abrasive does not participate in the lapping process. When the oil film was developed, the experimental results showed a high surface roughness and poor flatness of the substrate, as only large abrasive particles participated in the lapping process. Therefore, to improve the lapping characteristics, it is important to reduce the groove density by reducing the groove pitch, which prevents the development of the oil film.
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2020 Tipo de documento: Article

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2020 Tipo de documento: Article