A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope.

Allen, Frances I

Allen, Frances I.

Afiliação

Allen FI; Department of Materials Science and Engineering, University of California, Berkeley, CA 94720, USA.

Beilstein J Nanotechnol ; 12: 633-664, 2021.

Article em En | MEDLINE | ID: mdl-34285866

Palavras-chave

defect engineering; focused helium ion beam milling; focused helium ion beam-induced deposition; helium ion beam lithography; helium ion implantation

Texto completo

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8261528
https://dx.doi.org/10.3762/bjnano.12.52

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2021 Tipo de documento: Article

Texto completo

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8261528
https://dx.doi.org/10.3762/bjnano.12.52

Imprimir

XML

PubMed Links

Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2021 Tipo de documento: Article