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Protocol for fabricating a photonic structure consisting of ZnO/Ag/ZnO film perforated with 2D periodic apertures based on photolithography technology.
Dang, Saichao; Zhou, Jiayu; Ye, Hong; Peng, Fangfang; Wei, Yu; Li, Wenjuan; Wang, Xiuxia; He, Yizhao.
Afiliação
  • Dang S; Department of Thermal Science and Energy Engineering, University of Science and Technology of China (USTC), Hefei 230027, People's Republic of China.
  • Zhou J; Department of Thermal Science and Energy Engineering, University of Science and Technology of China (USTC), Hefei 230027, People's Republic of China.
  • Ye H; Department of Thermal Science and Energy Engineering, University of Science and Technology of China (USTC), Hefei 230027, People's Republic of China.
  • Peng F; USTC Center for Micro and Nanoscale Research and Fabrication, Hefei 230027, People's Republic of China.
  • Wei Y; USTC Center for Micro and Nanoscale Research and Fabrication, Hefei 230027, People's Republic of China.
  • Li W; USTC Center for Micro and Nanoscale Research and Fabrication, Hefei 230027, People's Republic of China.
  • Wang X; USTC Center for Micro and Nanoscale Research and Fabrication, Hefei 230027, People's Republic of China.
  • He Y; USTC Center for Micro and Nanoscale Research and Fabrication, Hefei 230027, People's Republic of China.
STAR Protoc ; 3(2): 101242, 2022 06 17.
Article em En | MEDLINE | ID: mdl-35310071
ABSTRACT
A ZnO/Ag/ZnO film with 2D periodic apertures can have a high visible transmittance and low emittances in atmospheric windows for visible-infrared compatible camouflage and a high transmittance in 5-8 µm for heat dissipation by radiation. This following protocol details the fabrication process of such a photonic structure based on photolithography technology. Also described are the related challenges and troubleshooting steps. For complete details on the use and execution of this protocol, please refer to Dang and Ye (2021).
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Óxido de Zinco Idioma: En Ano de publicação: 2022 Tipo de documento: Article

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Óxido de Zinco Idioma: En Ano de publicação: 2022 Tipo de documento: Article