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Slip Flow Analysis in an Experimental Chamber Simulating Differential Pumping in an Environmental Scanning Electron Microscope.
Sabacká, Pavla; Maxa, Jirí; Bayer, Robert; Vyroubal, Petr; Binar, Tomás.
Afiliação
  • Sabacká P; Institute of Scientific Instruments of the CAS, Královopolská 147, 61200 Brno, Czech Republic.
  • Maxa J; Department of Electrical and Electronic Technology, Brno University of Technology, 61600 Brno, Czech Republic.
  • Bayer R; Institute of Scientific Instruments of the CAS, Královopolská 147, 61200 Brno, Czech Republic.
  • Vyroubal P; Department of Electrical and Electronic Technology, Brno University of Technology, 61600 Brno, Czech Republic.
  • Binar T; Department of Electrical and Electronic Technology, Brno University of Technology, 61600 Brno, Czech Republic.
Sensors (Basel) ; 22(23)2022 Nov 22.
Article em En | MEDLINE | ID: mdl-36501735
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article
Texto completo
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2022 Tipo de documento: Article