Antenna-based reduced IR absorbers for high-performance microbolometers.

Absorbers for long-wavelength infrared (LWIR) are designed to have a reduced geometry fitted to a gold cross antenna and numerically studied. Compared to the square membrane geometry widely used in conventional microbolometers, the reduced geometry results in smaller thermal capacities of the vanadium dioxide (VO2) and silicon nitride (Si3N4) layers. However, near-field focusing by the cross antenna leads to a high LWIR absorption. Calculations show that the temperature change per incident energy increases with a decrease in the arm width, and the reduced absorber surpasses the square geometry for all incident angles and polarizations. The antenna-based reduced absorber studied here could serve as an alternative geometry for high-performance microbolometers.