Van der Waals Layer Transfer of 2D Materials for Monolithic 3D Electronic System Integration: Review and Outlook.
ACS Nano
; 17(3): 1831-1844, 2023 Feb 14.
Article
em En
| MEDLINE
| ID: mdl-36655854
metal-assisted layer transfer; monolithic three-dimensional integration; multifunctional three-dimensional integrated electronics; transition metal dichalcogenides; two-dimensional material template-assisted van der Waals transfer; two-dimensional materials; van der Waals layer transfer; wafer-scale and high-yield layer transfer
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1
Coleções:
01-internacional
Base de dados:
MEDLINE
Tipo de estudo:
Qualitative_research
Idioma:
En
Ano de publicação:
2023
Tipo de documento:
Article