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Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer.
Li, Tao; Zhang, Le; Geng, Wenping; He, Jian; Rao, Yongkang; Huo, Jiabing; Yan, Kunxian; Chou, Xiujian.
Afiliação
  • Li T; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Zhang L; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Geng W; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • He J; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Rao Y; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Huo J; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Yan K; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Chou X; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
Micromachines (Basel) ; 14(1)2023 Jan 14.
Article em En | MEDLINE | ID: mdl-36677270
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Ano de publicação: 2023 Tipo de documento: Article
Texto completo
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XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Ano de publicação: 2023 Tipo de documento: Article