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High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon.
Lin, Zhifan; Hu, Hao; Dai, Yifan; Zhong, Yaoyu; Xue, Shuai.
Afiliação
  • Lin Z; Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha 410073, China.
  • Hu H; College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China.
  • Dai Y; Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha 410073, China.
  • Zhong Y; College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China.
  • Xue S; Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha 410073, China.
Nanomaterials (Basel) ; 13(3)2023 Jan 18.
Article em En | MEDLINE | ID: mdl-36770359
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article
Texto completo
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XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article