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Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography.
Fahrbach, Michael; Xu, Min; Nyang'au, Wilson Ombati; Domanov, Oleg; Schwalb, Christian H; Li, Zhi; Kuhlmann, Christian; Brand, Uwe; Peiner, Erwin.
Afiliação
  • Fahrbach M; Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, Germany.
  • Xu M; Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6a/b, 38106 Braunschweig, Germany.
  • Nyang'au WO; Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany.
  • Domanov O; Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, Germany.
  • Schwalb CH; Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6a/b, 38106 Braunschweig, Germany.
  • Li Z; Department of Metrology, Kenya Bureau of Standards (KEBS), Popo Rd, Nairobi 00200, Kenya.
  • Kuhlmann C; GETec Microscopy GmbH, Am Heumarkt 13, 1030 Vienna, Austria.
  • Brand U; GETec Microscopy GmbH, Am Heumarkt 13, 1030 Vienna, Austria.
  • Peiner E; Quantum Design Microscopy GmbH, Im Tiefen See 60a, 64293 Darmstadt, Germany.
Sensors (Basel) ; 23(4)2023 Feb 10.
Article em En | MEDLINE | ID: mdl-36850600
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article
Texto completo
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PubMed Links
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article