Reverse engineering of e-beam deposited optical filters based on multi-sample photometric and ellipsometric data.
Appl Opt
; 62(7): B35-B42, 2023 Mar 01.
Article
em En
| MEDLINE
| ID: mdl-37132884
ABSTRACT
A post-production characterization approach based on spectral photometric and ellipsometric data related to a specially prepared set of samples is proposed. Single-layer (SL) and multilayer (ML) sets of samples presenting building blocks of the final sample were measured ex-situ, and reliable thicknesses and refractive indices of the final ML were determined. Different characterization strategies based on ex-situ measurements of the final ML sample were tried, reliability of their results was compared, and the best characterization approach for practical use, when preparation of the mentioned set of samples would be a luxury, is proposed.
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Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Ano de publicação:
2023
Tipo de documento:
Article