X-ray mirrors with sub-nanometre figure errors obtained by differential deposition of thin WSi<sub>2</sub> films.

Bras, Patrice; Morawe, Christian; Labouré, Sylvain; Perrin, François; Vivo, Amparo; Barrett, Raymond

X-ray mirrors with sub-nanometre figure errors obtained by differential deposition of thin WSi₂ films.

Bras, Patrice; Morawe, Christian; Labouré, Sylvain; Perrin, François; Vivo, Amparo; Barrett, Raymond.

Afiliação

Bras P; X-ray Optics Group, ESRF - The European Synchrotron, 71 Avenue des Martyrs, 38043 Grenoble, France.
Morawe C; X-ray Optics Group, ESRF - The European Synchrotron, 71 Avenue des Martyrs, 38043 Grenoble, France.
Labouré S; X-ray Optics Group, ESRF - The European Synchrotron, 71 Avenue des Martyrs, 38043 Grenoble, France.
Perrin F; X-ray Optics Group, ESRF - The European Synchrotron, 71 Avenue des Martyrs, 38043 Grenoble, France.
Vivo A; X-ray Optics Group, ESRF - The European Synchrotron, 71 Avenue des Martyrs, 38043 Grenoble, France.
Barrett R; X-ray Optics Group, ESRF - The European Synchrotron, 71 Avenue des Martyrs, 38043 Grenoble, France.

J Synchrotron Radiat ; 30(Pt 4): 708-716, 2023 Jul 01.

Article em En | MEDLINE | ID: mdl-37255023

Assuntos

Algoritmos; Síncrotrons; Raios X; Radiografia

Palavras-chave

Fizeau stitching; X-ray optics; differential deposition; figure correction; film stress; long trace profiler; magnetron sputtering; off-line metrology; surface roughness

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Algoritmos / Síncrotrons Tipo de estudo: Diagnostic_studies Idioma: En Ano de publicação: 2023 Tipo de documento: Article

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