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Optimization of Cu/Sn Alloy Sputtering Process Based on Orthogonal Experimental Design Method.
Liu, Shuangjie; Li, Xingwang; Hao, Yongping; Li, Xing; Liu, Fengli.
Afiliação
  • Liu S; School of Equipment Engineering, Shenyang Ligong University, Shenyang 110159, China.
  • Li X; School of Equipment Engineering, Shenyang Ligong University, Shenyang 110159, China.
  • Hao Y; School of Equipment Engineering, Shenyang Ligong University, Shenyang 110159, China.
  • Li X; School of Equipment Engineering, Shenyang Ligong University, Shenyang 110159, China.
  • Liu F; School of Mechanical Engineering, Shenyang Ligong University, Shenyang 110159, China.
Micromachines (Basel) ; 14(8)2023 Jul 31.
Article em En | MEDLINE | ID: mdl-37630075
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Ano de publicação: 2023 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Ano de publicação: 2023 Tipo de documento: Article