Preparation of High-Quality Samples for MEMS-Based In-Situ (S)TEM Experiments.

Srot, Vesna; Straubinger, Rainer; Predel, Felicitas; van Aken, Peter A

Srot, Vesna; Straubinger, Rainer; Predel, Felicitas; van Aken, Peter A.

Afiliação

Srot V; Max Planck Institute for Solid State Research, Stuttgart Center for Electron Microscopy, Stuttgart, Germany.
Straubinger R; Protochips Inc., Morrisville, NC, USA.
Predel F; Max Planck Institute for Solid State Research, Stuttgart Center for Electron Microscopy, Stuttgart, Germany.
van Aken PA; Max Planck Institute for Solid State Research, Stuttgart Center for Electron Microscopy, Stuttgart, Germany.

Microsc Microanal ; 29(2): 596-605, 2023 Apr 05.

Article em En | MEDLINE | ID: mdl-37749724

Palavras-chave

in-situ TEM; FIB; MEMS chips; electrical-biasing; sample preparation

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article