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Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si3N4-SiO2 Double-Covered Waveguiding Layer.
Li, Luming; Zhou, Mingyong; Huang, Lei; Jiang, Bingyan.
Afiliação
  • Li L; State Key Laboratory of Precision Manufacturing for Extreme Service Performance, Central South University, Changsha 410083, China.
  • Zhou M; College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China.
  • Huang L; State Key Laboratory of Precision Manufacturing for Extreme Service Performance, Central South University, Changsha 410083, China.
  • Jiang B; College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China.
Micromachines (Basel) ; 14(9)2023 Aug 30.
Article em En | MEDLINE | ID: mdl-37763859
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Diagnostic_studies Idioma: En Ano de publicação: 2023 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Diagnostic_studies Idioma: En Ano de publicação: 2023 Tipo de documento: Article